Nanotechnology: A Maker's Course Week 6

Which of the following are properties that can be added to a substrate with a thin film?

(Electrical Barrrier) All

What types of substrates can be treated with Atomic Layer Deposition?

All

What types of substrates can be treated with Chemical Layer Deposition?

All

The plasma in the PECVD chamber is formed using:

RF

In Chemical Vapor Deposition, like any vacuum deposition process, why are the chambers kept under vacuum even when not in use? (Please select the best answer)

To keep contaminantiots from accumulating inside the chamber

Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) are both thin film deposition techniques

True

In a PECVD system, the necessary activation energy that drives the chemical processes comes from the plasma. In non-plasma CVD processes, the activation energy is provided by:

high temperature

Solid, liquid and gas are three states of matter. PECVD utilizes a fourth state of matter called:

plasma